Studying the properties of nickel germanosilicides using the Romanov spectrum method and ellipsometric methods
Abstract
Nickel german silicides formed on a bulk single-crystal n-(Si1-x-Gex) (111) substrate are being investigated. Monogermanosilicide Ni(Ge1-x-Six) and silicide NiSi phases are formed sequentially with increasing annealing temperature from 200oC to 900oC on the n-Ge (110) substrate. The results obtained on the Romanov shift of Raman-“OCEAN INSIGHT”, graphs of layered monolayers of super lattices were plotted, studied using the Origin-Phyton software, layers, period, as well as thickness from 1 nm to 1000 nm and the band gap of nano-layers 0.03-0.1 eV were determined. The thickness of monolayers of super lattices 25, 75, 95, 375, 1050 nm was determined using a SER 850 SEN research 4.0 spectral ellipsometer manufactured by SENTECH Instruments GmbH.
